France-Grenoble: Microelectronic machinery and apparatus and microsystems

Agency: TED
State:
Level of Government: State & Local
Category:
  • 65 - Medical, Dental, and Veterinary Equipment and Supplies
Opps ID: NBD00003605898610116
Posted Date: Oct 4, 2017
Due Date:
Solicitation No: 388818-2017
Source: Members Only
04/10/2017 S190 - - Supplies - Contract award notice - Open procedure

France-Grenoble: Microelectronic machinery and apparatus and microsystems

2017/S 190-388818

Contract award notice

Results of the procurement procedure

Supplies

Directive 2014/24/EU

Section I: Contracting authority

I.1) Name and addresses
CEA Centre de Grenoble
17 rue des Martyrs
Grenoble Cedex 9
38054
France
Contact person: Acheteur ? Mme Vilela Stephanie
Telephone: +33 438784429
E-mail: stephanie.vilela@cea.fr
Fax: +33 438785060
NUTS code: FRK24

Internet address(es):

Main address: www.cea.fr

Address of the buyer profile: https://avis-de-marches.cea.fr

I.2) Joint procurement
I.4) Type of the contracting authority
Body governed by public law
I.5) Main activity
Other activity: Recherche

Section II: Object

II.1) Scope of the procurement
II.1.1) Title:

AOO-170537-SVI ? cluster 300 mm de depots dielectriques SIO 2, SIN et LOW K.

Reference number: 170537-SVI
II.1.2) Main CPV code
31712000
II.1.3) Type of contract
Supplies
II.1.4) Short description:

Le CEA-LETI recherche un systeme multi-reacteurs de depots ALD/PEALD/PECVD de materiaux dielectrique (SIO2, SIN, Low K, ) pour le traitement de plaques de 300 mm de diametre. L'equipement devra etre entierement automatique et les reacteurs devront pouvoir travailler entre 50 et 550C...

Il sera installe dans les salles blanches Microelectroniques du CEA-LETI ou il sera utilise 7 jours sur 7 et 24 heures sur 24.

II.1.6) Information about lots
This contract is divided into lots: no
II.2) Description
II.2.1) Title:
II.2.2) Additional CPV code(s)
II.2.3) Place of performance
NUTS code: FR
NUTS code: FRK24
II.2.4) Description of the procurement:

Systeme multi-reacteurs de depots ALD/PEALD/PECVD de materiaux dielectrique (SIO 2, SIN, Low K, ) pour le traitement de plaques de 300 mm de diametre. L'equipement devra etre entierement automatique et les reacteurs devront pouvoir travailler entre 50 et 550C...

Il sera installe dans les salles blanches Microelectroniques du CEA-LETI ou il sera utilise 7 jours sur 7 et 24 heures sur 24.

II.2.5) Award criteria
Quality criterion - Name: Technique / Weighting: 45
Quality criterion - Name: Delai / Weighting: 5
Price - Weighting: 50
II.2.11) Information about options
Options: no
II.2.13) Information about European Union funds
The procurement is related to a project and/or programme financed by European Union funds: no
II.2.14) Additional information

Section IV: Procedure

IV.1) Description
IV.1.1) Type of procedure
Open procedure
IV.1.3) Information about a framework agreement or a dynamic purchasing system
IV.1.6) Information about electronic auction
IV.1.8) Information about the Government Procurement Agreement (GPA)
The procurement is covered by the Government Procurement Agreement: yes
IV.2) Administrative information
IV.2.1) Previous publication concerning this procedure
Notice number in the OJ S: 2017/S 143-294144
IV.2.8) Information about termination of dynamic purchasing system
IV.2.9) Information about termination of call for competition in the form of a prior information notice

Section V: Award of contract

Title:

AOO-170537-SVI ? cluster 300 mm de depots dielectriques SIO2, SIN et Low K

A contract/lot is awarded: no
V.1) Information on non-award
The contract/lot is not awarded
No tenders or requests to participate were received or all were rejected

Section VI: Complementary information

VI.3) Additional information:
VI.4) Procedures for review
VI.4.1) Review body
Tribunal administratif de Grenoble
2 place de Verdun
Grenoble
38000
France
Telephone: +33 476429000
E-mail: ta-grenoble@juradm.fr
Fax: +33 476422269

Internet address: http://grenoble.tribunal-administratif.fr/

VI.4.2) Body responsible for mediation procedures
VI.4.3) Review procedure
VI.4.4) Service from which information about the review procedure may be obtained
Tribunal administratif de Grenoble
2 place de Verdun
Grenoble
38000
France
Telephone: +33 476429000
E-mail: ta-grenoble@juradm.fr
Fax: +33 476422269

Internet address: http://grenoble.tribunal-administratif.fr/

VI.5) Date of dispatch of this notice:
29/09/2017
04/10/2017 S190 - - Supplies - Contract award notice - Open procedure

France-Grenoble: Microelectronic machinery and apparatus and microsystems

2017/S 190-388818

Contract award notice

Results of the procurement procedure

Supplies

Directive 2014/24/EU

Section I: Contracting authority

I.1) Name and addresses
CEA Centre de Grenoble
17 rue des Martyrs
Grenoble Cedex 9
38054
France
Contact person: Acheteur ? Mme Vilela Stephanie
Telephone: +33 438784429
E-mail: stephanie.vilela@cea.fr
Fax: +33 438785060
NUTS code: FRK24

Internet address(es):

Main address: www.cea.fr

Address of the buyer profile: https://avis-de-marches.cea.fr

I.5) Main activity
Other activity: Recherche

Section II: Object

II.1) Scope of the procurement
II.1.1) Title:

AOO-170537-SVI ? cluster 300 mm de depots dielectriques SIO 2, SIN et LOW K.

Reference number: 170537-SVI
II.1.2) Main CPV code
31712000
II.1.3) Type of contract
Supplies
II.1.6) Information about lots
This contract is divided into lots: no
II.2) Description
II.2.1) Title:
II.2.2) Additional CPV code(s)
II.2.3) Place of performance
NUTS code: FR
NUTS code: FRK24

Section IV: Procedure

IV.2) Administrative information
IV.2.1) Previous publication concerning this procedure
Notice number in the OJ S: 2017/S 143-294144

Section V: Award of contract

Title:

AOO-170537-SVI ? cluster 300 mm de depots dielectriques SIO2, SIN et Low K

A contract/lot is awarded: no
V.1) Information on non-award
The contract/lot is not awarded
No tenders or requests to participate were received or all were rejected

Section VI: Complementary information

VI.5) Date of dispatch of this notice:
29/09/2017
TI Title France-Grenoble: Microelectronic machinery and apparatus and microsystems
ND Document number 388818-2017
PD Publication date 04/10/2017
OJ OJ S 190
TW Place GRENOBLE
AU Authority name CEA Centre de Grenoble
OL Original language FR
HD Heading - - Supplies - Contract award notice - Open procedure
CY Country FR
AA Type of authority 6 - Body governed by public law
HA EU Institution -
DS Document sent 29/09/2017
NC Contract 2 - Supplies
PR Procedure 1 - Open procedure
TD Document 7 - Contract award notice
RP Regulation 5 - European Union, with participation of GPA countries
PC CPV code 31712000 - Microelectronic machinery and apparatus and microsystems
OC Original CPV code 31712000 - Microelectronic machinery and apparatus and microsystems
RC NUTS code FR
FRK24
IA Internet address (URL) www.cea.fr
DI Directive Public procurement Directive 2014/24/EU

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