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Brookhaven Science Associates, LLC (BSA), under a Prime Contract for the operation of Brookhaven National Laboratory (BNL) with the U.S. Department of Energy (DOE), herewith solicits your proposal to furnish a Silicon Deep Reactive Ion Etch Reactor (SiDRIE).

The Center for Functional Nanomaterials (CFN) is a user-oriented research center whose mission is to be an open facility for the nanoscience research community and advance the science of nanomaterials that addresses the nations’ energy challenge. Research at CFN focuses on the development and application of advanced techniques to understand structure-processing-property relationships in functional nanomaterials. New and unique capabilities would enrich both internal research and our User program.

BSA is planning the procurement of silicon deep reactive ion etch reactor (SiDRIE) with single wafer semi-automatic transfer chamber for the Center for Integrated Nanotechnologies (CINT) at Sandia National Laboratories (SNL). The SiDRIE will be procured by Brookhaven Science Associates (BSA) on behalf of the CINT as part of the Nanoscale Science Research Center Recapitalization (NSRC-Recap) project. The SiDRIE reactor supports microfabrication efforts for highly selective, precision etching of single crystal silicon and Silicon On Insulator (SOI) materials for the development of Mid-Infrared Photonics, MEMS and other advanced material research activities. Dual purpose Si etch capability, providing both high speed time- multiplexed, high aspect ratio/through wafer etch and plasma dicing, and also shallow etching of crystalline silicon structures in the sub-micron region with high precision. The new system will include a single 100-200mm transfer chamber, a heated reaction chamber that includes a high power inductively coupled plasma unit, a heated/CW and Pulsed LF biasing electrode with associated gas delivery, vacuum and cooling systems, optical emissions spectrometry and laser interferometry.

BSA invites you to participate in accordance with the RFP letter and all supporting attachments. This requirement has been posted on the sam.gov website under Request for Proposals (RFP) 419159. The response due date is December 21, 2022 at 4:30 PM Eastern Time. Any questions concerning this RFP must be addressed via email to the attention of Maile Nichols at mnichols@bnl.gov.