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Argonne National Laboratory is looking to source one (1) Profilometer with the following specifications.

• Camera: Sampling Viewing Side view camera: 2.5mm x 4.25mm;

Top down camera: 11.5mm x 15.5mm

• Wafer Vacuum Chuck Package (Includes 3 WVCs - 2 - 3", 4 - 6" and 8")

• Nlite+ Low Force Measurement Capability

This low force option extends the standard force range below 1mg to 0.030mg for use on sensitive materials using

precision closed loop feedback

• Motorized X/Y stage with 6" x 6" (150x150mm) of travel, motorized 360-degree rotation

- includes 2-3, 4-6, or 8" vacuum chuck as standard with the system.

- LIS 3, low inertia sensor with 1 to 15mg of force

- Exclusive quick-change stylus technology. Re-calibration not required when exchanging styli.

- High-resolution digital color camera with selectable magnification

- Starter stylus (choose 2um)

- Optically flat scan block with 55mm scan length

- 4 angstrom step height repeatability, 1 sigma on 1,000 angstrom step

- Automatic stitching for up to 200mm scans

- 3D map collection and extensive data analysis

Please provide with your quotation:

• Signed Page one of the RFQ (ANL-70)


• Email acceptance of applicable terms and conditions (ANL-71COM)


• Completed ANL Reps and Certs (PD-159)


• Published Price List or Redacted Invoice


• Country of Origin for quoted items


• Provide your best lead time after receipt of the order.


• Provide any available discounts. (If GSA pricing is available, include contract # and expiration date).

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